Vol. 30, Issue 4, pp. 491-496

Vol. 30 Issue 4 pp. 491-496

Characterization of porous dielectric films by ellipsometric porosimetry

Baklanov Mikhail R., Mogilnikov Konstantin P.

Abstract

Ellipsometric porosimetry (EP) is a simple and effective method for characterization of porosity, average pore size, specific surface area and pore size distribution (PSI) in thin films deposited on top of any smooth solid substrate. This method is a new version of adsorption porosimetry. In situ ellipsometry is used to determine the amount of adsorptive adsorbed in the film. The change in refractive index is used for calculation of the quantity of the adsorptive present in the film. The EP allows the study of thermal stability, adsorption and swelling properties of porous films. Room temperature EP based on the adsorption of vapour of some organic solvents and a method for calculating the porosity and PSD are discussed.

Vol. 30
Issue 4
pp. 491-496

0.3 MB
OPTICA APPLICATA - a quarterly of the Wrocław University of Science and Technology, Faculty of Fundamental Problems of Technology