Vol. 41, Issue 2, pp. 383-388

  1. Archive
  2. Optica Applicata Vol. 41, Issue 2, pp. 383-388 (2011)
Vol. 41 Issue 2 pp. 383-388

Low temperature co-fired ceramics (LTCC) microsystems

Leszek Golonka, Pawel Bembnowicz, Dominik Jurkow, Karol Malecha, Henryk Roguszczak, Rafal Tadaszak

Keywords

low temperature co-fired ceramics (LTCC), microsystem, polymerase chain reaction (PCR), microreactor

Abstract

The paper presents general information on ceramic microsystems. Low temperature co-fired ceramics (LTCC) technology is described in detail. Research and development on the LTCC sensors and microsystems carried out at Wroc³aw University of Technology (Poland) are presented. Microfluidic system, polymerase chain reaction (PCR) microreactor, acceleration sensor and sol–gel fiber optics for ceramic microsystems are described.

Vol. 41
Issue 2
pp. 383-388

0.6 MB
OPTICA APPLICATA - a quarterly of the Wrocław University of Science and Technology, Faculty of Fundamental Problems of Technology