Vol. 42, Issue 1, pp. 121-128

Vol. 42 Issue 1 pp. 121-128

Research and fabrication of integrated optical chip of Mach–Zehnder microinterference accelerometer

Tang Dong-Lin, Dai Bing, He Shan, Xiao Kun-Qing, Zhang Liang, Wang Peng

Keywords

integrated optics, Mach–Zehnder microinterference chip, accelerometer, Ti:LiNbO3 waveguide

Abstract

A novel hybrid-integrated optical accelerometer, based on Mach–Zehnder interference, is described. The integrated Mach–Zehnder microinterferometer chip is investigated theoretically and experimentally. On the LiNbO3 substrate with the dimensions of 38 mm×6 mm×2 mm, MMI optical power splitter, Y-branching guide, phase modulator and polarizers are integrated to constitute the Mach–Zehnder microinterference chip. The performance of a prototype of the accelerometer is characterised. The measured frequency spectrum is in good agreement with the theoretical prediction.

Vol. 42
Issue 1
pp. 121-128

0.44 MB
OPTICA APPLICATA - a quarterly of the Wrocław University of Science and Technology, Faculty of Fundamental Problems of Technology