Vol. 33, Issue 2-3, pp. 315-327

Vol. 33 Issue 2-3 pp. 315-327

Inverse problem in scatterometry of rough surfaces

Czeslaw Lukianowicz

Keywords

light scattering, inverse problem, surface roughness

Abstract

The aim of the paper is to examine one of variant inverse problems constituting the basis for surface roughness measurements by light scattering methods. This problem consists in determining the scatterer form based on measured distribution of scattered light intensity. A solution of the inverse problem amounts to determination of the optical signal from a measured squared modulus of the Fourier transform of this signal. The paper presents methods for solving the inverse problem. For that purpose, the initial modification of the light wave on the surface measured was carried out so that the complex light amplitude was described by accordingly attenuated Hermitian function. The method presented can be used for analysis of other, similar problems.

Vol. 33
Issue 2-3
pp. 315-327

0.86 MB
OPTICA APPLICATA - a quarterly of the Wrocław University of Science and Technology, Faculty of Fundamental Problems of Technology