Vol. 41, Issue 2, pp. 383-388 (2011)
Keywords
low temperature co-fired ceramics (LTCC), microsystem, polymerase chain reaction (PCR), microreactor
Abstract
The paper presents general information on ceramic microsystems. Low temperature co-fired ceramics (LTCC) technology is described in detail. Research and development on the LTCC sensors and microsystems carried out at Wroc³aw University of Technology (Poland) are presented. Microfluidic system, polymerase chain reaction (PCR) microreactor, acceleration sensor and sol–gel fiber optics for ceramic microsystems are described.