Vol. 42, Issue 3, pp. 533-543 (2012)

Abstract

A model of the optical transmittance of a diamond/quartz/vacuum system in the infrared range is presented in the paper. The model relies on the attenuation of unpolarized light emitted by the substrate, the intensity of which is subsequently measured by the pyrometer at two close wavelengths. Changes in the film thickness give rise to the phase shift between the waves, which in turn influences the apparent temperature measured by the pyrometer. Periodic variation of  the apparent temperature is therefore modeled in order to extract the changes in the film thickness and surface roughness. Another question discussed within the frame of the model is the true temperature estimation in the case of samples with the roughest surfaces.