Vol. 43, Issue 1, pp. 123-132 (2013)

Abstract

The structure, topography and morphology of Pd–C films were studied by AFM (atomic force microscopy), SEM (scanning electron microscopy), Raman and FTIR (Fourier transform infrared spectroscopy) methods. It was found that an increasing content of palladium in films causes a decrease in their roughness and size of nanograins. The topography and morphology of Pd–C films depend on the content of palladium in the film, what was found from the analysis of SEM and AFM images. FTIR and Raman spectra show that the content of fullerene and palladium in the film strongly depends on technological parameters of PVD (physical vapor deposition) process.