Vol. 43, Issue 1, pp. 187-194

Vol. 43 Issue 1 pp. 187-194

Temperature-dependence of cathodoluminescence of zinc oxide monolayers obtained by atomic layer deposition

Bartlomiej Slawomir Witkowski, Lukasz Wachnicki, Piotr Nowakowski, Andrzej Suchocki, Marek Godlewski


zinc oxide, cathodoluminescence, profiling, temperature-dependence, localization


We performed cathodoluminescence (CL) investigations of zinc oxide monolayers obtained by atomic layer deposition. Layers of different thickness were deposited on commercial GaN/sapphire templates. Scanning electron microscopy (SEM) system equipped with CL allows direct comparison of SEM images and CL maps, taken from exactly the same areas of samples. In addition to SEM and CL images, CL profiling was performed by collecting the CL spectra at different accelerating voltages. The CL profiling allows to distinguish the emissions from a surface and volume of samples. An inter-link between samples microstructure and emission properties is investigated. Shifts of emission bands, associated by us with the localization effects, are observed. CL investigations are supported by photoluminescence (PL) measurements, which are characterized by a higher spectral resolution. PL investigations allow determination of the origin of emission bands.

Vol. 43
Issue 1
pp. 187-194

0.95 MB
OPTICA APPLICATA - a quarterly of the Wrocław University of Science and Technology, Faculty of Fundamental Problems of Technology