Vol. 45, Issue 1, pp. 113-123
Keywords
geometry size measurement, linear image sensor, linear interpolation algorithm
Abstract
High precision automated size measurements are required during industrial and scientific applications. The principle of sub-pixel measuring is based on an intensity interpolation algorithm. Combined with the characteristics of light, a system with high precision, short measuring time and low cost was developed. The proposed system is then applied to the measurement of 5 cm objects and compared with traditional measuring techniques. The experiment demonstrates that the measuring accuracy can reach up to 0.012 μm, and that the measurement size of the system is practical and prompt. In addition, it is able to meet the requirement for industrial applications in a variety of settings with stable performance and high precision.